Large High Vacuum Pneumatic Angle Valve

Body

Stainless steel

Body Sealing

Viton

Plate Sealing

Viton

Shaft Sealing

Viton or stainless steel bellows

Body leakage rate

＜1.13x10-8 Pa.L/（bellows sealing）

Body leakage rate

≤5×10-7 Pa·L/s（viton sealing）

Vacuum range

1.2 x105 Pa to 1 x10-6 Pa （bellows sealing）

Vacuum range

1.2 x105 Pa to 1 x10-5 Pa （viton sealing）

Gas pressure from cylinder

0.4-0.7MPa

Size of inlet pipe

OD: 6 mm

Voltage

AC 220V/50Hz or DC 24V

Position indicator

magnetic switch

Medium temperature

-30℃ to +150℃

Mounting position

any (DN63 to DN160)

Mounting position

sealing plate faces the vacumm side (DN＞160)