High Vacuum Pneumatic Gate Valve

Body

Stainless steel or AL alloy

Body sealing

Viton or metal available

Plate sealing

Viton

Shaft sealing

Stainless steel bellows

Valve body leakage rage

≤1.13x10-8 Pa.L/s

Vacuum range

1.0 x105 Pa to 1 x10-7 Pa

Differential pressure on the plate at opening

≤3000Pa

Closing or opening time

≤10s (depends on size)

Position indicator

Micro switch or magnetic switch

Bake-out temperature of valve body

open≤200℃ close≤150℃

Gas pressure from cylinder

0.5-0.7Mpa(dry gas)

Voltage

AC 220V/50Hz or DC 24V

Mounting position

Any